Reliability Aspects of Microsystems for Automotive Applications

The implementation of microsystems in automotive applications is certainly one of the driving forces for the success of MEMS as an industrial technology on mass production level. In many cases, automotive systems based on microsensors are critical to safety. Consequently, microsystems have to assure...

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Veröffentlicht in:	Advanced engineering materials 2009-04, Vol.11 (4), p.316-323
Hauptverfasser:	Müller-Fiedler, Roland, Nötzold, Kerstin, Schneider, Arnold, Rank, Holger, Graf, Jürgen
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuits MEMS Micro- and nanoelectromechanical devices (mems/nems) Microsystems Reliability Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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