Effect of (Ba + Sr/Ti) ratio on the dielectric properties for highly (111) oriented (Ba,Sr)TiO3 thin films
The (1 1 1) oriented barium strontium titanate (BST) thin films have been fabricated at 600 deg C on platinized Si substrates by RF-magnetron sputtering deposition at various deposition pressures. The crystal structure, surface morphology, and interface of the thin films have been characterized by X...
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| Veröffentlicht in: | Journal of alloys and compounds 2009-05, Vol.475 (1-2), p.827-831 |
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| container_title | Journal of alloys and compounds |
| container_volume | 475 |
| creator | Wang, Yi Liu, Baoting Wei, Feng Yang, Zhimin Du, Jun |
| description | The (1 1 1) oriented barium strontium titanate (BST) thin films have been fabricated at 600 deg C on platinized Si substrates by RF-magnetron sputtering deposition at various deposition pressures. The crystal structure, surface morphology, and interface of the thin films have been characterized by XRD, FE-SEM, and TEM, respectively. Ba/Sr and (Ba + Sr)/Ti atomic ratios of the films are investigated by inductively coupled plasma spectroscopy. It is found that the dielectric constant and tunability of the obtained films considerably depend on the (Ba + Sr)/Ti ratio. The near-stoichiometry (4% Ti rich) film exhibits a highest dielectric constant and maximum tunability of 682 and 49%, respectively. The large off-stoichiometry film prepared at 20 mTorr has lowest losses (0.0064). |
| doi_str_mv | 10.1016/j.jallcom.2008.08.012 |
| format | Article |
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The crystal structure, surface morphology, and interface of the thin films have been characterized by XRD, FE-SEM, and TEM, respectively. Ba/Sr and (Ba + Sr)/Ti atomic ratios of the films are investigated by inductively coupled plasma spectroscopy. It is found that the dielectric constant and tunability of the obtained films considerably depend on the (Ba + Sr)/Ti ratio. The near-stoichiometry (4% Ti rich) film exhibits a highest dielectric constant and maximum tunability of 682 and 49%, respectively. 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| source | Elsevier ScienceDirect Journals |
| subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Permittivity (dielectric function) Physics Structure of solids and liquids crystallography Structure of specific crystalline solids |
| title | Effect of (Ba + Sr/Ti) ratio on the dielectric properties for highly (111) oriented (Ba,Sr)TiO3 thin films |
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