Diamond nanoseeding on silicon : Stability under H2 MPCVD exposures and early stages of growth

Detonation nanodiamond dispersed on silicon surfaces underwent different H2 MPCVD exposures. The induced changes at the surface have been characterized in situ by XPS and XEELS. Then, a short CH4/H2 growth step was applied. This sequential study revealed an excellent stability of detonation nanodiam...

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Veröffentlicht in:Diamond and related materials 2008-07, Vol.17 (7-10), p.1143-1149
Hauptverfasser: ARNAULT, J. C, SAADA, S, NESLADEK, M, WILLIAMS, O. A, HAENEN, K, BERGONZO, P, OSAWA, E
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container_end_page 1149
container_issue 7-10
container_start_page 1143
container_title Diamond and related materials
container_volume 17
creator ARNAULT, J. C
SAADA, S
NESLADEK, M
WILLIAMS, O. A
HAENEN, K
BERGONZO, P
OSAWA, E
description Detonation nanodiamond dispersed on silicon surfaces underwent different H2 MPCVD exposures. The induced changes at the surface have been characterized in situ by XPS and XEELS. Then, a short CH4/H2 growth step was applied. This sequential study revealed an excellent stability of detonation nanodiamond. The sp3 etching rate is insufficient to remove nanodiamond even under intense H2 plasma. The H2 exposure could be successfully used to remove C-C sp2 carbon without altering sp3 seeds. Moreover, the formation of silicon carbide observed after the hydrogen treatment is thought to be helpful to enhance the adhesion of nanodiamond particles on the substrate.
doi_str_mv 10.1016/j.diamond.2008.01.008
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source ScienceDirect Journals (5 years ago - present)
subjects Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Fullerenes and related materials
diamonds, graphite
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Methods of nanofabrication
Nanocrystalline materials
Nanoscale materials and structures: fabrication and characterization
Physics
Specific materials
Theory and models of film growth
title Diamond nanoseeding on silicon : Stability under H2 MPCVD exposures and early stages of growth
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