The deformation of microcantilever-based infrared detectors during thermal cycling

Uncooled microcantilever-based infrared (IR) detectors have recently gained interest due to their low noise equivalent temperature difference (NETD), while concurrently maintaining low costs. These properties have made them available for a wider range of applications. However, the curvature induced...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2008-07, Vol.18 (7), p.075012-075012 (9)
Hauptverfasser:	Lin, I-Kuan, Zhang, Yanhang, Zhang, Xin
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Solid mechanics Static elasticity (thermoelasticity...) Structural and continuum mechanics
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