Polymeric like carbon films prepared from liquid gas and the effect of nitrogen

Polymeric like carbon (PLC) films are grown by a capacitance coupled RF-PECVD on the grounded electrode at room temperature from liquid gas (40% propane and 60% butane) in two regimes with nitrogen and without nitrogen gas. Films are characterized by X-ray photoelectron spectroscopy (XPS), atomic fo...

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Veröffentlicht in:	Applied surface science 2008-08, Vol.254 (20), p.6441-6445
Hauptverfasser:	Ghodselahi, T., Vesaghi, M.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	a-C:H nanoparticle AFM Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology FTIR Physics Raman RF-PECVD XPS
Online-Zugang:	Volltext
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