Net Shape Manufacturing of Three-Dimensional SiCN Ceramic Microstructures Using an Isotropic Shrinkage Method by Introducing Shrinkage Guiders

Net Shape Manufacturing of Three-Dimensional SiCN Ceramic Microstructures Using an Isotropic Shrinkage Method by Introducing Shrinkage Guiders

The two‐photon cross‐linking (TPC) process using ceramic precursors is recognized as a unique fabrication means of real three‐dimensional (3D) ceramic microstructures. These structures can be applied to various microscale devices that are used in harsh conditions that demand high strength, high temp...

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Veröffentlicht in:International journal of applied ceramic technology 2008-05, Vol.5 (3), p.258-264
Hauptverfasser: Lim, Tae Woo, Son, Yong, Yang, Dong-Yol, Pham, Tuan Anh, Kim, Dong-Pyo, Yang, Byeong-Il, Lee, Kwang-Sup, Park, Sang Hu
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container_end_page 264
container_issue 3
container_start_page 258
container_title International journal of applied ceramic technology
container_volume 5
creator Lim, Tae Woo
Son, Yong
Yang, Dong-Yol
Pham, Tuan Anh
Kim, Dong-Pyo
Yang, Byeong-Il
Lee, Kwang-Sup
Park, Sang Hu
description The two‐photon cross‐linking (TPC) process using ceramic precursors is recognized as a unique fabrication means of real three‐dimensional (3D) ceramic microstructures. These structures can be applied to various microscale devices that are used in harsh conditions that demand high strength, high temperature endurance, and good chemical corrosion properties. However, the large shrinkage amount of 3D structures during pyrolysis is a serious limitation to the practical application of these structures; during pyrolysis, asymmetric distortion and shrinkage occur intrinsically. In an attempt to address this, a method is proposed for the precise fabrication of 3D ceramic microstructures that utilize shrinkage guiders to lead to isotropic shrinkage. SiCN ceramic woodpile structures were fabricated to show the efficiency and usefulness of the proposed method. In the results, the woodpiles showed no distortion after pyrolysis.
doi_str_mv 10.1111/j.1744-7402.2008.02234.x
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title Net Shape Manufacturing of Three-Dimensional SiCN Ceramic Microstructures Using an Isotropic Shrinkage Method by Introducing Shrinkage Guiders
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