Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors
Carbon nanotubes (CNTs) have been fabricated by microwave plasma-enhanced chemical vapor deposition for detecting the presence of ethanol vapor. The conductance of the CNTs decreases when the sensors are successively exposed to ethanol vapor at room temperature. The surface of the CNTs was modified...
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| Veröffentlicht in: | Diamond and related materials 2009-02, Vol.18 (2), p.472-477 |
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| container_end_page | 477 |
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| container_issue | 2 |
| container_start_page | 472 |
| container_title | Diamond and related materials |
| container_volume | 18 |
| creator | Hu, Chia-Te Liu, Chun-Kuo Huang, Meng-Wen Syue, Sen-Hong Wu, Jyh-Ming Chang, Yee-shyi Yeh, Jien-W. Shih, Han-C. |
| description | Carbon nanotubes (CNTs) have been fabricated by microwave plasma-enhanced chemical vapor deposition for detecting the presence of ethanol vapor. The conductance of the CNTs decreases when the sensors are successively exposed to ethanol vapor at room temperature. The surface of the CNTs was modified in oxygen plasma to elevate the detection sensitivity for ethanol. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas devices. |
| doi_str_mv | 10.1016/j.diamond.2008.10.057 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_33815350</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0925963508005177</els_id><sourcerecordid>33815350</sourcerecordid><originalsourceid>FETCH-LOGICAL-c370t-dac24681f6e23883fbb26c2c7c1048ef501df46b45e6788a8d82efbe39ae86063</originalsourceid><addsrcrecordid>eNqFkM1LxDAQxYMouK7-CUIvemvNR5umJ5HFL1hQRM8hTSdulrZZM13B_94su3j19ODNezPMj5BLRgtGmbxZF503Qxi7glOqklfQqj4iM6bqJqdU8mMyow2v8kaK6pScIa4pZbwp2Yy8vfYGB5PDuDKjhS6zKxi8NX32bTYhZh1sAvrJhzGzJrZJRjOGadsCZi7NYUq90GefBjOEEUPEc3LiTI9wcdA5-Xi4f1885cuXx-fF3TK3oqZT3hnLS6mYk8CFUsK1LZeW29oyWipwFWWdK2VbViBrpYzqFAfXgmgMKEmlmJPr_d5NDF9bwEkPHi30vRkhbFELoVglKpqC1T5oY0CM4PQm-sHEH82o3hHUa30gqHcEd3YimHpXhwMGExEXEyGPf2XOeMlL0aTc7T4H6dtvD1Gj9bCj6SPYSXfB_3PpFwL5ip4</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>33815350</pqid></control><display><type>article</type><title>Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors</title><source>ScienceDirect Journals (5 years ago - present)</source><creator>Hu, Chia-Te ; Liu, Chun-Kuo ; Huang, Meng-Wen ; Syue, Sen-Hong ; Wu, Jyh-Ming ; Chang, Yee-shyi ; Yeh, Jien-W. ; Shih, Han-C.</creator><creatorcontrib>Hu, Chia-Te ; Liu, Chun-Kuo ; Huang, Meng-Wen ; Syue, Sen-Hong ; Wu, Jyh-Ming ; Chang, Yee-shyi ; Yeh, Jien-W. ; Shih, Han-C.</creatorcontrib><description>Carbon nanotubes (CNTs) have been fabricated by microwave plasma-enhanced chemical vapor deposition for detecting the presence of ethanol vapor. The conductance of the CNTs decreases when the sensors are successively exposed to ethanol vapor at room temperature. The surface of the CNTs was modified in oxygen plasma to elevate the detection sensitivity for ethanol. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas devices.</description><identifier>ISSN: 0925-9635</identifier><identifier>EISSN: 1879-0062</identifier><identifier>DOI: 10.1016/j.diamond.2008.10.057</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Adsorption ; Carbon nanotubes ; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) ; Conductance ; Cross-disciplinary physics: materials science; rheology ; Ethanol ; Exact sciences and technology ; Gas sensor ; General equipment and techniques ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Nanoscale materials and structures: fabrication and characterization ; Nanotubes ; Other topics in nanoscale materials and structures ; Physics ; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing ; Surface modification</subject><ispartof>Diamond and related materials, 2009-02, Vol.18 (2), p.472-477</ispartof><rights>2008 Elsevier B.V.</rights><rights>2009 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c370t-dac24681f6e23883fbb26c2c7c1048ef501df46b45e6788a8d82efbe39ae86063</citedby><cites>FETCH-LOGICAL-c370t-dac24681f6e23883fbb26c2c7c1048ef501df46b45e6788a8d82efbe39ae86063</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.diamond.2008.10.057$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,3550,23930,23931,25140,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=21242439$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Hu, Chia-Te</creatorcontrib><creatorcontrib>Liu, Chun-Kuo</creatorcontrib><creatorcontrib>Huang, Meng-Wen</creatorcontrib><creatorcontrib>Syue, Sen-Hong</creatorcontrib><creatorcontrib>Wu, Jyh-Ming</creatorcontrib><creatorcontrib>Chang, Yee-shyi</creatorcontrib><creatorcontrib>Yeh, Jien-W.</creatorcontrib><creatorcontrib>Shih, Han-C.</creatorcontrib><title>Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors</title><title>Diamond and related materials</title><description>Carbon nanotubes (CNTs) have been fabricated by microwave plasma-enhanced chemical vapor deposition for detecting the presence of ethanol vapor. The conductance of the CNTs decreases when the sensors are successively exposed to ethanol vapor at room temperature. The surface of the CNTs was modified in oxygen plasma to elevate the detection sensitivity for ethanol. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas devices.</description><subject>Adsorption</subject><subject>Carbon nanotubes</subject><subject>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)</subject><subject>Conductance</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Ethanol</subject><subject>Exact sciences and technology</subject><subject>Gas sensor</subject><subject>General equipment and techniques</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Nanotubes</subject><subject>Other topics in nanoscale materials and structures</subject><subject>Physics</subject><subject>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</subject><subject>Surface modification</subject><issn>0925-9635</issn><issn>1879-0062</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNqFkM1LxDAQxYMouK7-CUIvemvNR5umJ5HFL1hQRM8hTSdulrZZM13B_94su3j19ODNezPMj5BLRgtGmbxZF503Qxi7glOqklfQqj4iM6bqJqdU8mMyow2v8kaK6pScIa4pZbwp2Yy8vfYGB5PDuDKjhS6zKxi8NX32bTYhZh1sAvrJhzGzJrZJRjOGadsCZi7NYUq90GefBjOEEUPEc3LiTI9wcdA5-Xi4f1885cuXx-fF3TK3oqZT3hnLS6mYk8CFUsK1LZeW29oyWipwFWWdK2VbViBrpYzqFAfXgmgMKEmlmJPr_d5NDF9bwEkPHi30vRkhbFELoVglKpqC1T5oY0CM4PQm-sHEH82o3hHUa30gqHcEd3YimHpXhwMGExEXEyGPf2XOeMlL0aTc7T4H6dtvD1Gj9bCj6SPYSXfB_3PpFwL5ip4</recordid><startdate>20090201</startdate><enddate>20090201</enddate><creator>Hu, Chia-Te</creator><creator>Liu, Chun-Kuo</creator><creator>Huang, Meng-Wen</creator><creator>Syue, Sen-Hong</creator><creator>Wu, Jyh-Ming</creator><creator>Chang, Yee-shyi</creator><creator>Yeh, Jien-W.</creator><creator>Shih, Han-C.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20090201</creationdate><title>Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors</title><author>Hu, Chia-Te ; Liu, Chun-Kuo ; Huang, Meng-Wen ; Syue, Sen-Hong ; Wu, Jyh-Ming ; Chang, Yee-shyi ; Yeh, Jien-W. ; Shih, Han-C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c370t-dac24681f6e23883fbb26c2c7c1048ef501df46b45e6788a8d82efbe39ae86063</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Adsorption</topic><topic>Carbon nanotubes</topic><topic>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)</topic><topic>Conductance</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Ethanol</topic><topic>Exact sciences and technology</topic><topic>Gas sensor</topic><topic>General equipment and techniques</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Materials science</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Nanotubes</topic><topic>Other topics in nanoscale materials and structures</topic><topic>Physics</topic><topic>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</topic><topic>Surface modification</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hu, Chia-Te</creatorcontrib><creatorcontrib>Liu, Chun-Kuo</creatorcontrib><creatorcontrib>Huang, Meng-Wen</creatorcontrib><creatorcontrib>Syue, Sen-Hong</creatorcontrib><creatorcontrib>Wu, Jyh-Ming</creatorcontrib><creatorcontrib>Chang, Yee-shyi</creatorcontrib><creatorcontrib>Yeh, Jien-W.</creatorcontrib><creatorcontrib>Shih, Han-C.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Diamond and related materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hu, Chia-Te</au><au>Liu, Chun-Kuo</au><au>Huang, Meng-Wen</au><au>Syue, Sen-Hong</au><au>Wu, Jyh-Ming</au><au>Chang, Yee-shyi</au><au>Yeh, Jien-W.</au><au>Shih, Han-C.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors</atitle><jtitle>Diamond and related materials</jtitle><date>2009-02-01</date><risdate>2009</risdate><volume>18</volume><issue>2</issue><spage>472</spage><epage>477</epage><pages>472-477</pages><issn>0925-9635</issn><eissn>1879-0062</eissn><abstract>Carbon nanotubes (CNTs) have been fabricated by microwave plasma-enhanced chemical vapor deposition for detecting the presence of ethanol vapor. The conductance of the CNTs decreases when the sensors are successively exposed to ethanol vapor at room temperature. The surface of the CNTs was modified in oxygen plasma to elevate the detection sensitivity for ethanol. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas devices.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.diamond.2008.10.057</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0925-9635 |
| ispartof | Diamond and related materials, 2009-02, Vol.18 (2), p.472-477 |
| issn | 0925-9635 1879-0062 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_33815350 |
| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Adsorption Carbon nanotubes Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Conductance Cross-disciplinary physics: materials science rheology Ethanol Exact sciences and technology Gas sensor General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Methods of deposition of films and coatings film growth and epitaxy Nanoscale materials and structures: fabrication and characterization Nanotubes Other topics in nanoscale materials and structures Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Surface modification |
| title | Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T12%3A23%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Plasma-enhanced%20chemical%20vapor%20deposition%20carbon%20nanotubes%20for%20ethanol%20gas%20sensors&rft.jtitle=Diamond%20and%20related%20materials&rft.au=Hu,%20Chia-Te&rft.date=2009-02-01&rft.volume=18&rft.issue=2&rft.spage=472&rft.epage=477&rft.pages=472-477&rft.issn=0925-9635&rft.eissn=1879-0062&rft_id=info:doi/10.1016/j.diamond.2008.10.057&rft_dat=%3Cproquest_cross%3E33815350%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=33815350&rft_id=info:pmid/&rft_els_id=S0925963508005177&rfr_iscdi=true |