Theoretical Study on Self-Calibration for the Wide-Range Laser Auto-Collimation Method

A wide-range laser auto-collimation method to measure the surface profiles of targets with steep slopes has been proposed. This method employs a deflecting optical system to enlarge the measurement range of the angle sensor. However, this optical system also changes the sensitivity property of the a...

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Veröffentlicht in:Key engineering materials 2008-01, Vol.381-382, p.271-274
Hauptverfasser: Hayashi, Osamu, Shimizu, Hiroki
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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