Voxels: volume-enclosing microstructures
This paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs(R) was used to construct a variety of polysilicon devices capable of being fold...
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| Veröffentlicht in: | Journal of micromechanics and microengineering 2008-05, Vol.18 (5), p.055025-055025 (6) |
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| container_end_page | 055025 (6) |
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| container_issue | 5 |
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| container_title | Journal of micromechanics and microengineering |
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| creator | Gagler, Rob Bugacov, Alejandro Koel, Bruce E Will, Peter M |
| description | This paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs(R) was used to construct a variety of polysilicon devices capable of being folded from two-dimensional shapes into three-dimensional regular solids with dimensions in the order of 40-80 mum per side. Folding of the devices was performed by a combination of magnetic and surface tension forces in water. Complete closure of pyramidal structures with dimensions down to 40 mum per side was achieved, as well as folding of five-sided boxes and half-dodecahedrons (lotuses) with dimensions down to 40 mum per side. |
| doi_str_mv | 10.1088/0960-1317/18/5/055025 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0960-1317 |
| ispartof | Journal of micromechanics and microengineering, 2008-05, Vol.18 (5), p.055025-055025 (6) |
| issn | 0960-1317 1361-6439 |
| language | eng |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| title | Voxels: volume-enclosing microstructures |
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