Towards fully polymeric MEMS: Fabrication and testing of PEDOT/PSS strain gauges

In recent years first commercial devices based on organic electronic materials entered the market. Recent market studies mention the necessity to include sensors in the design of organic electronic devices in order to broaden the range of applications. It is therefore essential to identify potential...

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Veröffentlicht in:	Microelectronic engineering 2008-05, Vol.85 (5-6), p.1050-1053
Hauptverfasser:	Lang, Udo, Rust, Philipp, Dual, Jurg
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Applied sciences Baytron Bulge test Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Lift-off Micro- and nanoelectromechanical devices (mems/nems) PEDOT/PSS Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Strain gauge factor
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