Structural and morphological properties of thin ZnO films grown by pulsed laser deposition

The pulsed laser deposition technique was used to produce zinc oxide thin films onto silicon and Corning glass substrates. Homogeneous surfaces exhibiting quite small Root Mean Square (RMS) roughness, consisting of shaped grains were obtained, their grain diameters being 40–90 nm at room temperature...

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Veröffentlicht in:	Applied surface science 2008-06, Vol.254 (17), p.5475-5480
Hauptverfasser:	Suchea, M., Christoulakis, S., Tibeica, C., Katharakis, M., Kornilios, N., Efthimiopoulos, T., Koudoumas, E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy (AFM) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser deposition Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Physical properties of thin films, nonelectronic Physics Single-crystal and powder diffraction Structure and morphology thickness Structure of solids and liquids crystallography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films coatings Transmission electron microscopy (TEM) X-ray diffraction (XRD) X-ray diffraction and scattering
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