Structural and morphological properties of thin ZnO films grown by pulsed laser deposition
The pulsed laser deposition technique was used to produce zinc oxide thin films onto silicon and Corning glass substrates. Homogeneous surfaces exhibiting quite small Root Mean Square (RMS) roughness, consisting of shaped grains were obtained, their grain diameters being 40–90 nm at room temperature...
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| Veröffentlicht in: | Applied surface science 2008-06, Vol.254 (17), p.5475-5480 |
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| container_issue | 17 |
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| container_title | Applied surface science |
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| creator | Suchea, M. Christoulakis, S. Tibeica, C. Katharakis, M. Kornilios, N. Efthimiopoulos, T. Koudoumas, E. |
| description | The pulsed laser deposition technique was used to produce zinc oxide thin films onto silicon and Corning glass substrates. Homogeneous surfaces exhibiting quite small Root Mean Square (RMS) roughness, consisting of shaped grains were obtained, their grain diameters being 40–90
nm at room temperature and at 650
°C growth respectively. Films were polycrystalline, even for growth at room temperature, with preferential crystallite orientation the (0
0
2) basal plane of wurtzite ZnO. Temperature increase caused evolution from grain to grain agglomeration structures, improving crystallinity. Compressive to tensile stresses transition with temperature was found while the lattice constant decreased. |
| doi_str_mv | 10.1016/j.apsusc.2008.02.112 |
| format | Article |
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nm at room temperature and at 650
°C growth respectively. Films were polycrystalline, even for growth at room temperature, with preferential crystallite orientation the (0
0
2) basal plane of wurtzite ZnO. Temperature increase caused evolution from grain to grain agglomeration structures, improving crystallinity. Compressive to tensile stresses transition with temperature was found while the lattice constant decreased.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2008.02.112</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Atomic force microscopy (AFM) ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Laser deposition ; Materials science ; Mechanical and acoustical properties ; Methods of deposition of films and coatings; film growth and epitaxy ; Physical properties of thin films, nonelectronic ; Physics ; Single-crystal and powder diffraction ; Structure and morphology; thickness ; Structure of solids and liquids; crystallography ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thin film structure and morphology ; Thin films coatings ; Transmission electron microscopy (TEM) ; X-ray diffraction (XRD) ; X-ray diffraction and scattering</subject><ispartof>Applied surface science, 2008-06, Vol.254 (17), p.5475-5480</ispartof><rights>2008 Elsevier B.V.</rights><rights>2008 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c367t-986b7eb014d57f09cc044428cf2dbcb307b5dbc95d5713cd172e7070a1754ba93</citedby><cites>FETCH-LOGICAL-c367t-986b7eb014d57f09cc044428cf2dbcb307b5dbc95d5713cd172e7070a1754ba93</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2008.02.112$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=20429644$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Suchea, M.</creatorcontrib><creatorcontrib>Christoulakis, S.</creatorcontrib><creatorcontrib>Tibeica, C.</creatorcontrib><creatorcontrib>Katharakis, M.</creatorcontrib><creatorcontrib>Kornilios, N.</creatorcontrib><creatorcontrib>Efthimiopoulos, T.</creatorcontrib><creatorcontrib>Koudoumas, E.</creatorcontrib><title>Structural and morphological properties of thin ZnO films grown by pulsed laser deposition</title><title>Applied surface science</title><description>The pulsed laser deposition technique was used to produce zinc oxide thin films onto silicon and Corning glass substrates. Homogeneous surfaces exhibiting quite small Root Mean Square (RMS) roughness, consisting of shaped grains were obtained, their grain diameters being 40–90
nm at room temperature and at 650
°C growth respectively. Films were polycrystalline, even for growth at room temperature, with preferential crystallite orientation the (0
0
2) basal plane of wurtzite ZnO. Temperature increase caused evolution from grain to grain agglomeration structures, improving crystallinity. Compressive to tensile stresses transition with temperature was found while the lattice constant decreased.</description><subject>Atomic force microscopy (AFM)</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Laser deposition</subject><subject>Materials science</subject><subject>Mechanical and acoustical properties</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Physical properties of thin films, nonelectronic</subject><subject>Physics</subject><subject>Single-crystal and powder diffraction</subject><subject>Structure and morphology; thickness</subject><subject>Structure of solids and liquids; crystallography</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thin film structure and morphology</subject><subject>Thin films coatings</subject><subject>Transmission electron microscopy (TEM)</subject><subject>X-ray diffraction (XRD)</subject><subject>X-ray diffraction and scattering</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNp9kLtOwzAUhi0EEqXwBgxeYEvwLXGyICHETarUAVi6WI7jtK7SOPgkoL49rlIxMtnyfznHH0LXlKSU0Pxum-oeRjApI6RICUspZSdoRgvJkywrxCmaRVuZCM7ZOboA2BJCWVRnaPU-hNEMY9At1l2Ndz70G9_6tTPxpQ--t2FwFrBv8LBxHV51S9y4dgd4HfxPh6s97scWbI1bDTbg2vYe3OB8d4nOGh2Vq-M5R5_PTx-Pr8li-fL2-LBIDM_lkJRFXklbESrqTDakNIYIIVhhGlZXpuJEVlm8lFmUKTc1lcxKIommMhOVLvkc3U69cduv0cKgdg6MbVvdWT-C4jwrOS9FNIrJaIIHCLZRfXA7HfaKEnUAqbZqAqkOIBVhKoKMsZtjv4YIpQm6Mw7-sowIVubiUH8_-Wz87LezQYFxtjO2dsGaQdXe_T_oF1-HjII</recordid><startdate>20080630</startdate><enddate>20080630</enddate><creator>Suchea, M.</creator><creator>Christoulakis, S.</creator><creator>Tibeica, C.</creator><creator>Katharakis, M.</creator><creator>Kornilios, N.</creator><creator>Efthimiopoulos, T.</creator><creator>Koudoumas, E.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20080630</creationdate><title>Structural and morphological properties of thin ZnO films grown by pulsed laser deposition</title><author>Suchea, M. ; 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crystallography</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thin film structure and morphology</topic><topic>Thin films coatings</topic><topic>Transmission electron microscopy (TEM)</topic><topic>X-ray diffraction (XRD)</topic><topic>X-ray diffraction and scattering</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Suchea, M.</creatorcontrib><creatorcontrib>Christoulakis, S.</creatorcontrib><creatorcontrib>Tibeica, C.</creatorcontrib><creatorcontrib>Katharakis, M.</creatorcontrib><creatorcontrib>Kornilios, N.</creatorcontrib><creatorcontrib>Efthimiopoulos, T.</creatorcontrib><creatorcontrib>Koudoumas, E.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Suchea, M.</au><au>Christoulakis, S.</au><au>Tibeica, C.</au><au>Katharakis, M.</au><au>Kornilios, N.</au><au>Efthimiopoulos, T.</au><au>Koudoumas, E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Structural and morphological properties of thin ZnO films grown by pulsed laser deposition</atitle><jtitle>Applied surface science</jtitle><date>2008-06-30</date><risdate>2008</risdate><volume>254</volume><issue>17</issue><spage>5475</spage><epage>5480</epage><pages>5475-5480</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>The pulsed laser deposition technique was used to produce zinc oxide thin films onto silicon and Corning glass substrates. Homogeneous surfaces exhibiting quite small Root Mean Square (RMS) roughness, consisting of shaped grains were obtained, their grain diameters being 40–90
nm at room temperature and at 650
°C growth respectively. Films were polycrystalline, even for growth at room temperature, with preferential crystallite orientation the (0
0
2) basal plane of wurtzite ZnO. Temperature increase caused evolution from grain to grain agglomeration structures, improving crystallinity. Compressive to tensile stresses transition with temperature was found while the lattice constant decreased.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2008.02.112</doi><tpages>6</tpages></addata></record> |
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| ispartof | Applied surface science, 2008-06, Vol.254 (17), p.5475-5480 |
| issn | 0169-4332 1873-5584 |
| language | eng |
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| source | ScienceDirect Freedom Collection (Elsevier) |
| subjects | Atomic force microscopy (AFM) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser deposition Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Physical properties of thin films, nonelectronic Physics Single-crystal and powder diffraction Structure and morphology thickness Structure of solids and liquids crystallography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films coatings Transmission electron microscopy (TEM) X-ray diffraction (XRD) X-ray diffraction and scattering |
| title | Structural and morphological properties of thin ZnO films grown by pulsed laser deposition |
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