Integrating functional ceramics into microsystems

Micro electromechanical systems (MEMS) have applications in a diverse range of fields. The presence of a diverse range of materials imposes constraints in the design of, and use of fabrication technologies for, MEMS. In addition, the need to structure these materials on the micro-scale introduces ad...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of the European Ceramic Society 2008, Vol.28 (7), p.1397-1403
Hauptverfasser:	Dorey, R.A., Rocks, S.A., Dauchy, F., Wang, D., Bortolani, F., Hugo, E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Building materials. Ceramics. Glasses Ceramic industries Chemical industry and chemicals Electronics Electrotechnical and electronic ceramics Exact sciences and technology Functional applications Micro- and nanoelectromechanical devices (mems/nems) PZT Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Shaping Sol–gel processes Technical ceramics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!