Amorphous-CuTa/amorphous-CoZrNb multilayers: Structure, mechanical properties and thermal stability

CuTa/CoZrNb multilayers were prepared by direct current magnetron sputtering. The structure, mechanical properties and thermal stability were investigated by X-ray diffraction, high-resolution transmission electron microscopy, vacuum annealing and nanoindentation. The results show that the as-deposi...

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Veröffentlicht in:Surface & coatings technology 2008-05, Vol.202 (17), p.4242-4247
Hauptverfasser: Zong, R.L., Wen, S.P., Lv, F., Zeng, F., Gao, Y., Pan, F.
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container_end_page 4247
container_issue 17
container_start_page 4242
container_title Surface & coatings technology
container_volume 202
creator Zong, R.L.
Wen, S.P.
Lv, F.
Zeng, F.
Gao, Y.
Pan, F.
description CuTa/CoZrNb multilayers were prepared by direct current magnetron sputtering. The structure, mechanical properties and thermal stability were investigated by X-ray diffraction, high-resolution transmission electron microscopy, vacuum annealing and nanoindentation. The results show that the as-deposited multilayers possess amorphous/amorphous structure. The amorphous feature leads to the lack of hardness enhancement with decreasing modulation periodicity, which can be attributed to the absence of the dislocation movement. After thermal annealing, the density increases due to the decrease of the bond distance and the annihilation of defects with increasing annealing temperature. The densification results in the enhancement of the elastic modulus and hardness. The enhancement for the multilayers with smaller modulation periodicity is more sensitive to thermal annealing because of larger volume fraction of interfaces.
doi_str_mv 10.1016/j.surfcoat.2008.03.017
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subjects Amorphous
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Mechanical properties
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Metals. Metallurgy
Multilayers
Physics
Surface treatments
Thermal stability
title Amorphous-CuTa/amorphous-CoZrNb multilayers: Structure, mechanical properties and thermal stability
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