Grain size effect on structural, electrical and mechanical properties of NiTi thin films deposited by magnetron co-sputtering

In the present study NiTi films have been deposited on Si (100) substrates by dc magnetron co-sputtering in the temperature range from room temperature to 923 K. The crystallization, surface morphology and structural features were studied using X-ray diffraction (XRD), atomic force microscope (AFM),...

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Veröffentlicht in:	Surface & coatings technology 2009-03, Vol.203 (12), p.1596-1603
Hauptverfasser:	Kumar, Ashvani, Singh, Devendra, Kaur, Davinder
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology DC magnetron co-sputtering Electrical resistance Exact sciences and technology Materials science Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy NiTi thin films Physics Production techniques Surface morphology Surface treatment Surface treatments Thermal coefficient of resistance
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