Direct writing of carbon nanotube patterns by laser-induced chemical vapor deposition on a transparent substrate

Dot array and line patterns of multi-walled carbon nanotubes (MWCNTs) were successfully grown by laser-induced chemical vapor deposition (LCVD) on a transparent substrate at room temperature. In the proposed technique, a Nd:YVO 4 laser with a wavelength of 532 nm irradiates the backside of multiple...

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Veröffentlicht in:	Applied surface science 2009-02, Vol.255 (8), p.4526-4530
Hauptverfasser:	Park, J.B., Jeong, M.S., Jeong, S.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon nanotube Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser chemical vapor deposition Laser direct writing Multiple-catalyst-layer Physics
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container_title	Applied surface science
container_volume	255
creator	Park, J.B. Jeong, M.S. Jeong, S.H.
description	Dot array and line patterns of multi-walled carbon nanotubes (MWCNTs) were successfully grown by laser-induced chemical vapor deposition (LCVD) on a transparent substrate at room temperature. In the proposed technique, a Nd:YVO 4 laser with a wavelength of 532 nm irradiates the backside of multiple catalyst layers (Ni/Al/Cr) through a transparent substrate to induce a local temperature rise, thereby allowing the direct writing of dense dot and line patterns of MWCNTs below 10 μm in size to be produced with uniform density on the controlled positions. In this LCVD method, a multiple-catalyst-layer with a Cr thermal layer is the central component for enabling the growth of dense MWCNTs with good spatial resolution.
doi_str_mv	10.1016/j.apsusc.2008.11.070
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subjects	Carbon nanotube Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser chemical vapor deposition Laser direct writing Multiple-catalyst-layer Physics
title	Direct writing of carbon nanotube patterns by laser-induced chemical vapor deposition on a transparent substrate
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