Robust design for micromachined gyroscope using Taguchi three-stage design

This paper proposed a robust design method of a turning fork vibrating micromachined gyroscope using the Taguchi method, and determined the key variables sensitive to the systematic performance through an orthogonal test. Substructuring method is used in the simulation of structural parameters with the Taguchi methodology. The design project was presented, in which the smallest variances of the systematic performance indices are assured under the influence of the various disturbing factors. The results show that the complex problems such as the uncertainty of the processing errors caused by microscopic scale response, and the difficulties of measuring the performance variation can be settled by correcting the key structure parameters to realize the minimal variation of the performance through simple robust design, and that the signal/noise ratio can be improved. And the purpose of controlling the quality and the performance of products can be realized.