Reactive deposition of TiNx layers in a DC-magnetron discharge

TiNx layers have been deposited in ‘balanced mode’ and ‘unbalanced mode’ of a reactive DC‐magnetron plasma (carrier gas argon, reactive gas nitrogen) under different conditions. Discharge power and reactive gas flow have been varied. The layers have been examined by X‐ray photoelectron spectroscopy...

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Veröffentlicht in:	Surface and interface analysis 2008-03, Vol.40 (3-4), p.790-793
Hauptverfasser:	Wrehde, Stefan, Quaas, Marion, Bogdanowicz, Robert, Steffen, Hartmut, Wulff, Harm, Hippler, Rainer
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology DC-magnetron sputtering energy resolved mass spectroscopy Exact sciences and technology Physics spectroscopic ellipsometry X-ray surface analysis
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