The effect of substrate bias voltages on impact resistance of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering

CrAlN coatings were deposited on silicon and AISI H13 steel substrates using a modified ion beam enhanced magnetron sputtering system. The effect of substrate negative bias voltages on the impact property of the CrAlN coatings was studied. The X-ray diffraction (XRD) data show that all CrAlN coating...

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Veröffentlicht in:	Applied surface science 2009-01, Vol.255 (7), p.4033-4038
Hauptverfasser:	Chunyan, Yu, Linhai, Tian, Yinghui, Wei, Shebin, Wang, Tianbao, Li, Bingshe, Xu
Format:	Artikel
Sprache:	eng
Schlagworte:	CrAlN coatings Fracture toughness Hardness Impact resistance
Online-Zugang:	Volltext
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