Design and fabrication of a highly manufacturable MEMS probe card for high speed testing

We have designed and fabricated a micro-electro mechanical system (MEMS) probe card, which is suitable for a manufactured product, to achieve a deflection of 50 mum at a force of 1.5 gram (g) and a probe structure height of 720 mum. The cantilever structure consists of a tip and beam of Ni-Co, a bum...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2008-07, Vol.18 (7), p.075031-075031 (8)
Hauptverfasser:	Kim, Bong-Hwan, Kim, Jong-Bok
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micromechanical devices and systems Physics Testing, measurement, noise and reliability
Online-Zugang:	Volltext
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