Improvement of the uniformity in electronic properties of AZO films using an rf magnetron sputtering with a mesh grid electrode

We have investigated the deposition of Al-doped ZnO (AZO) films using a radio frequency (rf) magnetron sputtering apparatus with a mesh grid electrode. The improvement of the uniformity of crystallinity was achieved by the effect of the appropriate negative grid biases that suppress the impingement...

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Veröffentlicht in:	Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2008-02, Vol.148 (1), p.26-29
Hauptverfasser:	Yasui, Kanji, Asano, Akira, Otsuji, Miku, Katagiri, Hironori, Masuda, Atsushi, Nishiyama, Hiroshi, Inoue, Yasunobu, Takata, Masasuke, Akahane, Tadashi
Format:	Artikel
Sprache:	eng
Schlagworte:	Thin films Zinc oxide
Online-Zugang:	Volltext
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