Detection of ultrathin biological films using vacuum ultraviolet spectroscopic ellipsometry

Spectroscopic ellipsometry (SE) is a non-contact and a non-destructive optical technique used in characterization of thin films. It is widely used to determine optical constants, thickness in multilayer stacks and microstructure (voids, alloy fraction, or mixed phase composition). This paper reports...

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Veröffentlicht in:	Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2008-03, Vol.149 (1), p.26-33
Hauptverfasser:	Goyal, Dileep K., Pribil, Greg K., Woollam, John A., Subramanian, Anuradha
Format:	Artikel
Sprache:	eng
Schlagworte:	Ellipsometry Human immunoglobulin Oscillators Silane Vacuum ultraviolet
Online-Zugang:	Volltext
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