$Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS$

Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS

The influence of intrinsic stress gradient on the mode-I fracture of thin films with various thicknesses fabricated for Microelectromechanical Systems (MEMS) was investigated. The material system employed in this study was hydrogen-free tetrahedral amorphous diamond-like carbon (ta-C). Uniform gauge...

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Veröffentlicht in:	Journal of the mechanics and physics of solids 2008-02, Vol.56 (2), p.388-401
Hauptverfasser:	Jonnalagadda, Krishna, Cho, Sung Woo, Chasiotis, Ioannis, Friedmann, Thomas, Sullivan, John
Format:	Artikel
Sprache:	eng
Schlagworte:	Fracture Size effects Stress gradient Thin films
Online-Zugang:	Volltext
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