Short pulse laser microforming of thin metal sheets for MEMS manufacturing

Continuous and long-pulse lasers have been used for the forming of metal sheets for macroscopic mechanical applications. However, for the manufacturing of micro-electro-mechanical systems (MEMS), the applicability of such type of lasers is limited by the long-relaxation-time of the thermal fields re...

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Veröffentlicht in:	Applied surface science 2007-12, Vol.254 (4), p.997-1001
Hauptverfasser:	Ocaña, J.L., Morales, M., Molpeceres, C., García, O., Porro, J.A., García-Ballesteros, J.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Forming mechanism Laser micro-scale peen forming Numerical modelling
Online-Zugang:	Volltext
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