Epitaxial Integration of Transferable High‑κ Dielectric and 2D Semiconductor

The synthesis of high-dielectric-constant (high-κ) dielectric materials and their integration with channel materials have been the key challenges in the state-of-the-art transistor architecture, as they can provide strong gate control and low operating voltage. For next-generation electronics, high-...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of the American Chemical Society 2024-07, Vol.146 (30), p.20837-20844
Hauptverfasser: Cong, Xuzhong, Gao, Xiaoyin, Sun, Haoying, Zhou, Xuehan, Zhu, Yongchao, Gao, Xin, Tan, Congwei, Wang, Jingyue, Nian, Leyan, Nie, Yuefeng, Peng, Hailin
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!