Laser-induced forward transfer technique for maskless patterning of amorphous V2O5 thin film

A laser-induced forward transfer technique has been applied for the maskless patterning of amorphous V2O5 thin films. A sheet beam of a frequency doubled (SHG) Q-switched Nd:YAG laser was irradiated on a transparent glass substrate (donor), the rear surface of which was pre-coated with a vacuum-depo...

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Veröffentlicht in:	Applied surface science 2007-11, Vol.254 (2), p.638-643
Hauptverfasser:	CHAKRABORTY, S, SAKATA, H, YOKOYAMA, E, WAKAKI, M, CHAKRAVORTY, D
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Laser-beam impact phenomena Materials science Physics Surface cleaning, etching, patterning Surface treatments
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