Damage zone produced by the bombardment of stainless steel using Ti nitride PVD coatings

This paper presents the damage zone and defects produced by TiN thin film deposition on stainless steel using DC magnetron sputtering to produce collisions between the TiN ions and the substrate. The PVD process used a low operative pressure, reducing the bombardment damage on the substrate, in comp...

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Veröffentlicht in:	Applied surface science 2007-10, Vol.254 (1), p.201-206
Hauptverfasser:	Colorado, H.A., Ghilarducci, A.A., Salva, H.R., Suárez, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Anelasticity, internal friction, stress relaxation, and mechanical resonances Condensed matter: structure, mechanical and thermal properties Damage zone Exact sciences and technology Internal friction Ion radiation effects Mechanical and acoustical properties of condensed matter Mechanical and acoustical properties adhesion Physical radiation effects, radiation damage Physics Solid surfaces and solid-solid interfaces Structure and morphology thickness Structure of solids and liquids crystallography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin solid films
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