Micro/Nanomechanical Characterization of ScAlMgO4 Single Crystal by Instrumented Indentation and Scratch Methods

ScAlMgO4 (SCAM), which can be used as an epitaxial substrate material of GaN in power devices, faces the challenge of achieving a high-quality surface by ultra-precision polishing due to its brittle and easily cleaved characteristics, which are closely associated with its mechanical properties. The...

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Veröffentlicht in:Materials 2024-08, Vol.17 (15), p.3811
Hauptverfasser: Ni, Zifeng, Yu, Jie, Chen, Guomei, Ji, Mingjie, Qian, Shanhua, Bian, Da, Liu, Ming
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container_issue 15
container_start_page 3811
container_title Materials
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creator Ni, Zifeng
Yu, Jie
Chen, Guomei
Ji, Mingjie
Qian, Shanhua
Bian, Da
Liu, Ming
description ScAlMgO4 (SCAM), which can be used as an epitaxial substrate material of GaN in power devices, faces the challenge of achieving a high-quality surface by ultra-precision polishing due to its brittle and easily cleaved characteristics, which are closely associated with its mechanical properties. The micromechanical properties of SCAM single crystals were evaluated by nanoindentation and microscratch tests using different indenters. The elastic modulus EIT and the indentation hardness HIT of SCAM obtained by nanoindentation were 226 GPa and 12.1 GPa, respectively. Leaf-shaped chips and the associated step-like planes of SCAM can be found in the severely damaged regime during scratching by Berkovich and Vickers indenters with sharp edges due to the intersection of intense radial and lateral cracks. The fracture toughness (Kc = 1.12 MPa·m1/2) of SCAM can be obtained by using a scratch-based methodology for a spherical indenter based on linear elastic fracture mechanics (LEFM) under an appropriate range of applied loads. An optimal expression for calculating the fracture toughness of easily cleaved materials, including SCAM, via the Vickers indenter-induced cracking method using a Berkovich indenter was recommended.
doi_str_mv 10.3390/ma17153811
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subjects Cracking (fracturing)
Crystal structure
Diamond pyramid hardness tests
Elastic properties
Fracture mechanics
Fracture toughness
Linear elastic fracture mechanics
Mechanical properties
Microscopy
Modulus of elasticity
Nanoindentation
Scratching
Single crystals
Spectrum analysis
Substrates
title Micro/Nanomechanical Characterization of ScAlMgO4 Single Crystal by Instrumented Indentation and Scratch Methods
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