Study of Prefabricated Crack Propagation on Monocrystalline Silicon Surfaces for Grinding Damage Analysis

Crack generation and propagation are critical aspects of grinding processes for hard and brittle materials. Despite extensive research, the impact of residual cracks from coarse grinding on the cracks generated during fine grinding remains unexplored. This study aims to bridge this gap by examining...

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Veröffentlicht in:Materials 2024-08, Vol.17 (15), p.3852
Hauptverfasser: Zhao, Bingyao, Huang, Ning, Dai, Siyang, Zhou, Ping
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Sprache:eng
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