Stress, reflectance, and stability of Ru/Be multilayer coatings with Mo interlayers near the 11 nm wavelength

The stress, reflectance, and temporal stability of Ru/Be multilayer mirrors, both with and without Mo interlayers, were studied. A Ru/Be MLM was found to have zero stress at a Ru layer thickness-to-period ratio of γ ∼ 0.4. By adding Mo interlayers to both interfaces, it is possible to achieve a reco...

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Veröffentlicht in:	Optics letters 2024-07, Vol.49 (13), p.3690
Hauptverfasser:	Smertin, Ruslan, Chkhalo, Nikolai, Garakhin, Sergey, Polkovnikov, Vladimir, Zuev, Sergey
Format:	Artikel
Sprache:	eng
Schlagworte:	Interlayers Multilayers Reflectance Stability Thickness
Online-Zugang:	Volltext
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