Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2 µm wave band
Silicon photonic-integrated circuits (PICs) operating in the 2 µm wave band are of great interest for spectroscopic sensing, nonlinear optics, and optical communication applications. However, the performance of silicon PICs in this wave band lags far behind the conventional optical communication ban...
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Veröffentlicht in: | Optics letters 2024-06, Vol.49 (11), p.3271 |
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creator | Wei, Jincheng Zhu, Chunfan Yu, Ying Wang, Ruijun Yu, Siyuan |
description | Silicon photonic-integrated circuits (PICs) operating in the 2 µm wave band are of great interest for spectroscopic sensing, nonlinear optics, and optical communication applications. However, the performance of silicon PICs in this wave band lags far behind the conventional optical communication band (1310/1550 nm). Here we report the realization of a low-loss waveguide and an ultrahigh-Q microring resonator in the 2 µm wave band on a standard 200 mm silicon photonic platform. The single-mode strip waveguide fabricated on a 220 nm-thick silicon device layer has a record-low propagation loss ∼0.2 dB/cm. Based on the low-loss waveguide, we demonstrate an ultrahigh-Q microring resonator with a measured loaded Q-factor as high as 1.1 × 10
and intrinsic Q-factor of 2 × 10
, one order of magnitude higher than prior silicon resonators operating in the same wave band. The extinction ratio of the resonator is higher than 22 dB. These high-performance silicon photonic components pave the way for on-chip sensing applications and nonlinear optics in the 2 µm wave band. |
doi_str_mv | 10.1364/OL.525357 |
format | Article |
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and intrinsic Q-factor of 2 × 10
, one order of magnitude higher than prior silicon resonators operating in the same wave band. The extinction ratio of the resonator is higher than 22 dB. These high-performance silicon photonic components pave the way for on-chip sensing applications and nonlinear optics in the 2 µm wave band.</description><identifier>ISSN: 0146-9592</identifier><identifier>ISSN: 1539-4794</identifier><identifier>EISSN: 1539-4794</identifier><identifier>DOI: 10.1364/OL.525357</identifier><identifier>PMID: 38824381</identifier><language>eng</language><publisher>United States: Optical Society of America</publisher><subject>Integrated circuits ; Nonlinear optics ; Optical communication ; Optics ; Photonics ; Q factors ; Resonators ; Silicon ; Silicon devices ; Waveguides</subject><ispartof>Optics letters, 2024-06, Vol.49 (11), p.3271</ispartof><rights>Copyright Optical Society of America Jun 1, 2024</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c1181-b9d3bdec8a8dfe88d691baa017b042ca6cf02ad5bc996aaad51e2ad657bbe83e3</cites><orcidid>0000-0002-6712-6770</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>315,781,785,3259,27929,27930</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/38824381$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Wei, Jincheng</creatorcontrib><creatorcontrib>Zhu, Chunfan</creatorcontrib><creatorcontrib>Yu, Ying</creatorcontrib><creatorcontrib>Wang, Ruijun</creatorcontrib><creatorcontrib>Yu, Siyuan</creatorcontrib><title>Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2 µm wave band</title><title>Optics letters</title><addtitle>Opt Lett</addtitle><description>Silicon photonic-integrated circuits (PICs) operating in the 2 µm wave band are of great interest for spectroscopic sensing, nonlinear optics, and optical communication applications. However, the performance of silicon PICs in this wave band lags far behind the conventional optical communication band (1310/1550 nm). Here we report the realization of a low-loss waveguide and an ultrahigh-Q microring resonator in the 2 µm wave band on a standard 200 mm silicon photonic platform. The single-mode strip waveguide fabricated on a 220 nm-thick silicon device layer has a record-low propagation loss ∼0.2 dB/cm. Based on the low-loss waveguide, we demonstrate an ultrahigh-Q microring resonator with a measured loaded Q-factor as high as 1.1 × 10
and intrinsic Q-factor of 2 × 10
, one order of magnitude higher than prior silicon resonators operating in the same wave band. The extinction ratio of the resonator is higher than 22 dB. These high-performance silicon photonic components pave the way for on-chip sensing applications and nonlinear optics in the 2 µm wave band.</description><subject>Integrated circuits</subject><subject>Nonlinear optics</subject><subject>Optical communication</subject><subject>Optics</subject><subject>Photonics</subject><subject>Q factors</subject><subject>Resonators</subject><subject>Silicon</subject><subject>Silicon devices</subject><subject>Waveguides</subject><issn>0146-9592</issn><issn>1539-4794</issn><issn>1539-4794</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNpdkE1OwzAQRi0EoqWw4ALIEhtYpNhx7DhLVPEnRaqQYB3ZjtO6SuJiJ1Ts2HAkLsBROAkuLV2wGM2M9PQ08wFwitEYE5ZcTfMxjSmh6R4YYkqyKEmzZB8MEU5YlNEsHoAj7xcIIZYScggGhPM4IRwPgcztKqqt99Cb2ijbwpV41bPelBqKtgwF-7pzYm5m8-hxBzVGOetMO4NOe9uKzjpoWtjNNYy_3z--PptfD5TBcQwOKlF7fbLtI_B8e_M0uY_y6d3D5DqPFMYcRzIriSy14oKXlea8ZBmWQiCcSpTESjBVoViUVKosY0KECeuwM5pKqTnRZAQuNt6lsy-99l3RGK90XYtW294XBDGSMIIxCuj5P3Rhe9eG69YUZZjimAXqckOFX713uiqWzjTCvRUYFevgi2lebIIP7NnW2MtGlzvyL2nyA8vlf6o</recordid><startdate>20240601</startdate><enddate>20240601</enddate><creator>Wei, Jincheng</creator><creator>Zhu, Chunfan</creator><creator>Yu, Ying</creator><creator>Wang, Ruijun</creator><creator>Yu, Siyuan</creator><general>Optical Society of America</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0002-6712-6770</orcidid></search><sort><creationdate>20240601</creationdate><title>Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2 µm wave band</title><author>Wei, Jincheng ; Zhu, Chunfan ; Yu, Ying ; Wang, Ruijun ; Yu, Siyuan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1181-b9d3bdec8a8dfe88d691baa017b042ca6cf02ad5bc996aaad51e2ad657bbe83e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Integrated circuits</topic><topic>Nonlinear optics</topic><topic>Optical communication</topic><topic>Optics</topic><topic>Photonics</topic><topic>Q factors</topic><topic>Resonators</topic><topic>Silicon</topic><topic>Silicon devices</topic><topic>Waveguides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wei, Jincheng</creatorcontrib><creatorcontrib>Zhu, Chunfan</creatorcontrib><creatorcontrib>Yu, Ying</creatorcontrib><creatorcontrib>Wang, Ruijun</creatorcontrib><creatorcontrib>Yu, Siyuan</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>Optics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wei, Jincheng</au><au>Zhu, Chunfan</au><au>Yu, Ying</au><au>Wang, Ruijun</au><au>Yu, Siyuan</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2 µm wave band</atitle><jtitle>Optics letters</jtitle><addtitle>Opt Lett</addtitle><date>2024-06-01</date><risdate>2024</risdate><volume>49</volume><issue>11</issue><spage>3271</spage><pages>3271-</pages><issn>0146-9592</issn><issn>1539-4794</issn><eissn>1539-4794</eissn><abstract>Silicon photonic-integrated circuits (PICs) operating in the 2 µm wave band are of great interest for spectroscopic sensing, nonlinear optics, and optical communication applications. However, the performance of silicon PICs in this wave band lags far behind the conventional optical communication band (1310/1550 nm). Here we report the realization of a low-loss waveguide and an ultrahigh-Q microring resonator in the 2 µm wave band on a standard 200 mm silicon photonic platform. The single-mode strip waveguide fabricated on a 220 nm-thick silicon device layer has a record-low propagation loss ∼0.2 dB/cm. Based on the low-loss waveguide, we demonstrate an ultrahigh-Q microring resonator with a measured loaded Q-factor as high as 1.1 × 10
and intrinsic Q-factor of 2 × 10
, one order of magnitude higher than prior silicon resonators operating in the same wave band. The extinction ratio of the resonator is higher than 22 dB. These high-performance silicon photonic components pave the way for on-chip sensing applications and nonlinear optics in the 2 µm wave band.</abstract><cop>United States</cop><pub>Optical Society of America</pub><pmid>38824381</pmid><doi>10.1364/OL.525357</doi><orcidid>https://orcid.org/0000-0002-6712-6770</orcidid></addata></record> |
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source | Optica Publishing Group Journals |
subjects | Integrated circuits Nonlinear optics Optical communication Optics Photonics Q factors Resonators Silicon Silicon devices Waveguides |
title | Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2 µm wave band |
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