The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering
In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy,...
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| Veröffentlicht in: | Superlattices and microstructures 2007-07, Vol.42 (1), p.265-269 |
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| container_end_page | 269 |
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| container_title | Superlattices and microstructures |
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| creator | Rolo, A.G. Ayres de Campos, J. Viseu, T. de Lacerda-Arôso, T. Cerqueira, M.F. |
| description | In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E
2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated. |
| doi_str_mv | 10.1016/j.spmi.2007.04.069 |
| format | Article |
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2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated.</description><subject>Raman</subject><subject>Stress</subject><subject>Thin films</subject><subject>X-ray</subject><subject>ZnO</subject><issn>0749-6036</issn><issn>1096-3677</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNqNkE9LxDAQxYMouK5-AU85eWtNmjRpwIss_oOFvawXL6FNJ7tZum1NUsFvb8p6Fi8zA--9YeaH0C0lOSVU3B_yMB5dXhAic8JzItQZWlCiRMaElOdoQSRXmSBMXKKrEA6EEMWpXKDddg-47nuoO9fvMFgLJuKhxyH6ycTJ112SWzyM0Zk0j34YwUcHAQ8Wf_QbHPeux9Z1xzCL7WSgxc039rnNcRinGMGnzdfowtZdgJvfvkTvz0_b1Wu23ry8rR7XmeGMxkyKojKCtgoqUjRtwWVdFyWvJJeNAmusERU0DIpGMtWUTKmSAVWiVI3kJW_YEt2d9qZbPicIUR9dMNB1dQ_DFDQjlBVKsv8Zy1SWqDgZjR9C8GD16N2x9t-aEj3D1wc9w9czfE24TvBT6OEUgvTrlwOvg3HQJzbOJ8C6Hdxf8R8D9I4s</recordid><startdate>20070701</startdate><enddate>20070701</enddate><creator>Rolo, A.G.</creator><creator>Ayres de Campos, J.</creator><creator>Viseu, T.</creator><creator>de Lacerda-Arôso, T.</creator><creator>Cerqueira, M.F.</creator><general>Elsevier Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>7SR</scope><scope>8BQ</scope><scope>JG9</scope></search><sort><creationdate>20070701</creationdate><title>The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering</title><author>Rolo, A.G. ; Ayres de Campos, J. ; Viseu, T. ; de Lacerda-Arôso, T. ; Cerqueira, M.F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c431t-7628c61d9e802bd247aa2548747b9efcfc68eb3e2b739b539953e19659b7454b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Raman</topic><topic>Stress</topic><topic>Thin films</topic><topic>X-ray</topic><topic>ZnO</topic><toplevel>online_resources</toplevel><creatorcontrib>Rolo, A.G.</creatorcontrib><creatorcontrib>Ayres de Campos, J.</creatorcontrib><creatorcontrib>Viseu, T.</creatorcontrib><creatorcontrib>de Lacerda-Arôso, T.</creatorcontrib><creatorcontrib>Cerqueira, M.F.</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Materials Research Database</collection><jtitle>Superlattices and microstructures</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Rolo, A.G.</au><au>Ayres de Campos, J.</au><au>Viseu, T.</au><au>de Lacerda-Arôso, T.</au><au>Cerqueira, M.F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering</atitle><jtitle>Superlattices and microstructures</jtitle><date>2007-07-01</date><risdate>2007</risdate><volume>42</volume><issue>1</issue><spage>265</spage><epage>269</epage><pages>265-269</pages><issn>0749-6036</issn><eissn>1096-3677</eissn><abstract>In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E
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| subjects | Raman Stress Thin films X-ray ZnO |
| title | The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering |
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