Thermomechanical tensile characterization of Ti–Ni shape memory alloy films for design of MEMS actuator

This paper investigates thermomechanical deformation behaviors of titanium–nickel (Ti–Ni) shape memory alloy (SMA) films in order to derive their constitutive relationships for a reliable design of Ti–Ni SMA microelectromechanical systems (MEMS) actuators. dc magnetron sputtering with block-on-disk...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2007-09, Vol.139 (1), p.178-186
Hauptverfasser:	Namazu, Takahiro, Hashizume, Akinobu, Inoue, Shozo
Format:	Artikel
Sprache:	eng
Schlagworte:	Constitutive relation Poisson's ratio Shape memory alloy Tensile test Ti–Ni film X-ray diffraction Young's modulus
Online-Zugang:	Volltext
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