Cathodoluminescence studies of swift heavy ion irradiated Au/SiO2/p-Si structures

Cathodoluminescence measurements were performed on swift heavy ion irradiated and annealed Au/SiO2/p-Si structures. 5nm thick Au film was deposited on 500nm SiO2 thermally grown on [100] oriented p-type Si wafers. The Au/SiO2/p-Si structures were irradiated using 350MeV Au ions at fluences of 1-4X10...

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Veröffentlicht in:	Surface & coatings technology 2007-08, Vol.201 (19-20), p.8503-8505
Hauptverfasser:	WARANG, Trupti N, SAHOO, P. K, JOSHI, K. U, KOTHARI, D. C, ZHANG, K, MILINOVIC, V, LIEB, K. P, KLAUMÜNZER, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Physics Surface treatments
Online-Zugang:	Volltext
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