Sub-micron surface patterning by laser irradiation through microlens arrays

Microlens arrays (MLA) consist of a series of miniaturized lens that are arranged in certain form of order. The ability of MLA to focus incident light into a series of beam spots makes it useful in various applications such as optoelectronic, optical communications as well as parallel image processi...

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Veröffentlicht in:	Journal of materials processing technology 2007-10, Vol.192, p.328-333
Hauptverfasser:	Lim, C.S., Hong, M.H., Lin, Y., Chen, G.X., Senthil Kumar, A., Rahman, M., Tan, L.S., Fuh, J.Y.H., Lim, G.C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Femtosecond laser Microlens arrays Reactive ion etching (RIE) Surface patterning
Online-Zugang:	Volltext
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