X-ray diffraction peaks from misfit dislocations in double- and triple-crystal diffractometry

We propose a common description of the full widths at half maximum of X‐ray diffraction peaks obtained in different scans of triple‐crystal diffractometry and as well as for glancing incidence and glancing exit double‐crystal measurements. Calculations are compared with measurements of GaAs/Si(001)...

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Veröffentlicht in:Physica status solidi. A, Applications and materials science Applications and materials science, 2007-08, Vol.204 (8), p.2561-2566
Hauptverfasser: Kaganer, Vladimir M., Shalimov, Artem, Bak-Misiuk, Jadwiga, Ploog, Klaus H.
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container_issue 8
container_start_page 2561
container_title Physica status solidi. A, Applications and materials science
container_volume 204
creator Kaganer, Vladimir M.
Shalimov, Artem
Bak-Misiuk, Jadwiga
Ploog, Klaus H.
description We propose a common description of the full widths at half maximum of X‐ray diffraction peaks obtained in different scans of triple‐crystal diffractometry and as well as for glancing incidence and glancing exit double‐crystal measurements. Calculations are compared with measurements of GaAs/Si(001) heteroepitaxial films. We show that the diffraction peak broadening is entirely due to random 60° misfit dislocations that provide only a minor part of the misfit relaxation. The remaining relaxation is due to periodic edge misfit dislocations that do not contribute to the peak broadening. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
doi_str_mv 10.1002/pssa.200675657
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subjects 61.10.−i
61.72.Dd
61.72.Lk
68.35.−p
Composition
defects and impurities
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
title X-ray diffraction peaks from misfit dislocations in double- and triple-crystal diffractometry
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