BST thin films obtained by PLD for applications in electronics

Barium strontium titanate (BST) bulk ceramic with composition Ba 0.5Sr 0.5TiO 3 was produced by solid-state reaction and was used as target for PLD thin film deposition. A Nd-YAG laser, working at 5–10 Hz and different wavelengths has been used. Thin films of stoichiometric BST were deposited on alu...

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Veröffentlicht in:Applied surface science 2007-07, Vol.253 (19), p.8254-8257
Hauptverfasser: Scarisoreanu, N., Filipescu, M., Ioachim, A., Toacsan, M.I., Banciu, M.G., Nedelcu, L., Dutu, A., Buda, M., Alexandru, H.V., Dinescu, M.
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container_end_page 8257
container_issue 19
container_start_page 8254
container_title Applied surface science
container_volume 253
creator Scarisoreanu, N.
Filipescu, M.
Ioachim, A.
Toacsan, M.I.
Banciu, M.G.
Nedelcu, L.
Dutu, A.
Buda, M.
Alexandru, H.V.
Dinescu, M.
description Barium strontium titanate (BST) bulk ceramic with composition Ba 0.5Sr 0.5TiO 3 was produced by solid-state reaction and was used as target for PLD thin film deposition. A Nd-YAG laser, working at 5–10 Hz and different wavelengths has been used. Thin films of stoichiometric BST were deposited on alumina substrate with the thickness between 400 and 500 nm. An aditional annealing was carried out at 800 °C for 6 h. XRD and SEM were used for sample characterization. Capacity measurements were performed versus temperature at 100 kHz in a large temperature range. A diffuse ferroelectric–paraelectric phase transition with T C = −72 °C for the BST thin film was determined. A 5% tunability was measured in the transition region.
doi_str_mv 10.1016/j.apsusc.2007.02.111
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subjects Barium strontium titanate
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Physics
PLD
Tunability
title BST thin films obtained by PLD for applications in electronics
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