The response of clamped–clamped microbeams under mechanical shock

We present modeling, simulation, and characterization for the dynamic response of clamped–clamped microbeams under mechanical shock. A Galerkin-based reduced-order model is utilized and its results are verified by comparing to finite-element results. The results indicate that the response of a micro...

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Bibliographische Detailangaben

Veröffentlicht in:	International journal of non-linear mechanics 2007-05, Vol.42 (4), p.643-657
Hauptverfasser:	Younis, Mohammad I., Alsaleem, Fadi, Jordy, Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	Clamped–clamped microbeam Electrostatic actuation MEMS package Reliability of MEMS Shock and impact
Online-Zugang:	Volltext
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