Influence of methane concentration on crystal growing process in CVD free standing diamond films

The Macro-texture, grain boundary distribution and surface morphology in CVD free standing diamond films deposited with different methane concentrations were observed by X ray diffraction technology, electron backscatter diffraction and SEM. The crystal growing process of {100} and {111} planes in d...

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Veröffentlicht in:	Wu ji cai liao xue bao 2007-05, Vol.22 (3), p.570-576
Hauptverfasser:	Zhu, Hong-Xi, Mao, Wei-Min, Feng, Hui-Ping, Lu, Fan-Xiu, Vlasov, I I, Ralchenko, V G, Khomich, A V
Format:	Artikel
Sprache:	chi
Online-Zugang:	Volltext
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