Hybrid reciprocal space for X-ray diffraction in epitaxic layers

Even after several decades of systematic usage of X‐ray diffraction as one of the major analytical tool for epitaxic layers, the vision of the reciprocal space of these materials is still a simple superposition of two reciprocal lattices: one from the substrate and the other from the layer. In this work, the general theory accounting for hybrid reflections in the reciprocal space of layer/substrate systems is presented. It allows insight into the non‐trivial geometry of such reciprocal space as well as into many of its interesting properties. Such properties can be further exploited even on conventional‐source X‐ray diffractometers, leading to alternative, very detailed and comprehensive analyses of such materials.