Correlation between Vickers microhardness, porous layer thickness and porosity in p-type nanostructured silicon

Mechanical characteristics via Vickers microindentation technique of nanostructured silicon films have been studied. The samples were grown by the usual electrochemical etching process in presence of hydrofluoric acid in two distinct proportions and for several exposure times. The current density wa...

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Veröffentlicht in:	Applied surface science 2007-06, Vol.253 (17), p.7188-7191
Hauptverfasser:	Morales-Masís, M., Segura, L., Ramírez-Porras, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Microhardness Physics Porous silicon Vickers indentation
Online-Zugang:	Volltext
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