Patterning Local Dielectrics and Gates on Carbon Nanotubes

We have patterned local dielectric films and local top gates on carbon nanotube devices. The nanotubes were grown by chemical vapor deposition, and the top insulating layer is patterned locally by electron beam exposure of a spin-on glass (SOG) film. After development the exposed SOG film remains, a...

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Veröffentlicht in:	Bulletin of the American Physical Society 2004-03, Vol.49 (1)
Hauptverfasser:	Ayari, Anthony, Durkop, Tobias, Fuhrer, Michael
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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