Influence of the chemisorption state on the charge distribution of low energy Si scattered from I adatoms

The ion fractions of 5 keV Si + ions singly scattered from iodine adatoms adsorbed on Al(1 0 0), Si(1 1 1) and pre-oxidized Si(1 1 1) were measured with time-of-flight spectroscopy. A considerable ion yield was observed, which did not change significantly with exit angle or I coverage. The mechanism...

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Veröffentlicht in:Surface science 2007-06, Vol.601 (11), p.2378-2383
Hauptverfasser: Chen, X., Sroubek, Z., Yarmoff, J.A.
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Sprache:eng
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