Using fundamental studies of friction to predict the performance of MEMS devices

The design of reliable MEMS devices that involve sliding surfaces requires a predictive capability for friction and wear. We use atomic force microscopy (AFM) to resolve critical roughness features of silicon MEMS surfaces. From this, we derive surface roughness parameters that are used as inputs to...

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Veröffentlicht in:	Bulletin of the American Physical Society 2004-03, Vol.49 (1)
Hauptverfasser:	Carpick, Robert W, Flater, Erin E, Street, Mark D, Bora, Can K, Plesha, Michael E, Corwin, Alex D, de Boer, Maarten P
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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