Study of TiN and ZrN thin films grown by cathodic arc technique

Thin films of TiN and ZrN were grown on stainless steel 316 substrate using the pulsed cathodic arc technique with different number of discharges (one to five discharges). The coatings were characterized in terms of crystalline structure, microstructure, elementary chemical composition and stoichiom...

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Veröffentlicht in:	Applied surface science 2006-12, Vol.253 (4), p.1683-1690
Hauptverfasser:	Arias, D.F., Arango, Y.C., Devia, A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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