Real Time Observation of SiC Oxidation Using an In Situ Ellipsometer

Real time observation of SiC oxidation was performed using an in-situ ellipsometer over the temperature range from 900°C to 1150°C. The relations between oxide thickness and oxidation time were obtained precisely by virtue of the real time measurements. We analyzed the relations between oxide thickn...

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Veröffentlicht in:	Materials science forum 2006-10, Vol.527-529, p.1031-1034
Hauptverfasser:	Yoshida, Sadafumi, Hijikata, Yasuto, Kuboki, R., Yaguchi, Hiroyuki, Kakubari, K.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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