Low frequency noise measurement and analysis of capacitive micro-accelerometers
Noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/ f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. Unexpected resonances are also observed i...
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| Veröffentlicht in: | Microelectronic engineering 2007-05, Vol.84 (5), p.1788-1791 |
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| container_end_page | 1791 |
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| container_issue | 5 |
| container_start_page | 1788 |
| container_title | Microelectronic engineering |
| container_volume | 84 |
| creator | Mohd-Yasin, F. Nagel, D.J. Ong, D.S. Korman, C.E. Chuah, H.T. |
| description | Noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/
f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. Unexpected resonances are also observed in the commercial devices. Most importantly, an acceleration dependent of the noise is found in analog devices and freescale accelerometers, in contrast to prevailing theory. |
| doi_str_mv | 10.1016/j.mee.2007.01.168 |
| format | Article |
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| fulltext | fulltext |
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| ispartof | Microelectronic engineering, 2007-05, Vol.84 (5), p.1788-1791 |
| issn | 0167-9317 1873-5568 |
| language | eng |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Acceleration-dependent Applied sciences Electronics Exact sciences and technology Low frequency noise measurement Micro-accelerometers Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| title | Low frequency noise measurement and analysis of capacitive micro-accelerometers |
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