Fabrication of a three-dimensional micro-manipulator by laser irradiation and electrochemical techniques and the effect of electrolytes on its performance

Ribbon type and three-dimensional micro-actuators, consisting of three-layer structure of acrylic acid resin/Au/polypyrrole, were fabricated by aluminum anodizing, laser irradiation, and electrochemical techniques, and their performance was examined. Anodized aluminum specimens were irradiated with...

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Veröffentlicht in:	Electrochimica acta 2007-03, Vol.52 (13), p.4480-4486
Hauptverfasser:	Kikuchi, T., Akiyama, Y., Ueda, M., Sakairi, M., Takahashi, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied sciences Conducing polymer Electronics Exact sciences and technology Manipulator MEMS Micro- and nanoelectromechanical devices (mems/nems) Micro-actuator Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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