Oxygen-pressure dependence of the crystallinity of MgO films grown on Si(100) by PLD

Effects of the oxygen partial pressure on pulsed-laser deposition of MgO buffer layers on silicon substrates were investigated. The overall growth process was monitored in situ by reflection high-energy electron diffraction (RHEED) method. It was found that the crystallinity and surface morphology o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of crystal growth 2004-10, Vol.270 (3-4), p.553-559
Hauptverfasser:	Chen, Tonglai, Min Li, Xiao, Zhang, Sam, Rong Zeng, Hua
Format:	Artikel
Sprache:	eng
Schlagworte:	A1.RHEED A3.PLD B1.MgO B1.Thin films Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!