Deflection of microcantilever by growing vapor bubble

This work investigates the mechanics of microcantilever deflection due to growth of a vapor microbubble. We construct a theoretical model to predict the elastic beam deflection due to the capillary pressure developed by the bubble growing between the beam and a substrate. The theory is in good agree...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors and actuators. A. Physical. 2007-05, Vol.136 (2), p.717-722
Hauptverfasser:	Lee, Heon Ju, Chang, Young Soo, Lee, Yoon Pyo, Jeong, Kwang-Hun, Kim, Ho-Young
Format:	Artikel
Sprache:	eng
Schlagworte:	Bubble Elastocapillarity Microcantilever Surface tension
Online-Zugang:	Volltext
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